Optical coherence tomography for process control of laser micromachining.
Wiesner, Markus; Ihlemann, Jürgen; Müller, Heike H.; Lankenau, Eva; Hüttmann, Gereon; Review of Scientific Instruments, 2010, vol. 81, issue 3, p 033705, ISSN 00346748. ISBN 00346748.

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