We found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleIntegrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers.AuthorsHayamizu, Yuhei; Yamada, Takeo; Mizuno, Kohei; Davis, Robert C.; Futaba, Don N.; Yumura, Motoo; Hata, KenjiPublicationNature Nanotechnology, 2008, Vol 3, Issue 5, p289ISSN1748-3387Publication typearticleDOI10.1038/nnano.2008.98