We found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleFrom micro- to nanofabrication with soft materials.AuthorsQuake SR; Scherer APublicationScience (New York, N.Y.), 2000, Vol 290, Issue 5496, p1536ISSN0036-8075Publication typearticleDOI10.1126/science.290.5496.1536