We found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleAn interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements.AuthorsDargent, T.; Haddadi, K.; Lasri, T.; Clément, N.; Ducatteau, D.; Legrand, B.; Tanbakuchi, H.; Theron, D.PublicationReview of Scientific Instruments, 2013, Vol 84, Issue 12, p123705ISSN0034-6748Publication typearticleDOI10.1063/1.4848995