We found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleHighly sensitive silicon crystal torque sensor operating at the thermal noise limit.AuthorsHaiberger, L.; Weingran, M.; Schiller, S.PublicationReview of Scientific Instruments, 2007, Vol 78, Issue 2, p025101ISSN0034-6748Publication typearticleDOI10.1063/1.2437133