Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleFiner features for functional microdevices.AuthorsKawata S; Sun HB; Tanaka T; Takada KPublicationNature, 2001, Vol 412, Issue 6848, p697ISSN0028-0836Publication typearticleDOI10.1038/35089130