We found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleAlternative dielectrics to silicon dioxide for memory and logic devicesAuthorsKingon AI; Maria JP; Streiffer SKPublicationNature, 2000, Vol 406, Issue 6799, p1032ISSN1476-4687Publication typearticleDOI10.1038/35023243