We found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleImpact of parameter variation in fabrication of nanostructure by atomic force microscopy nanolithography.AuthorsDehzangi A; Larki F; Hutagalung SD; Goodarz Naseri M; Majlis BY; Navasery M; Hamid NA; Noor MMPublicationPloS one, 2013, Vol 8, Issue 6, pe65409ISSN1932-6203Publication typearticleDOI10.1371/journal.pone.0065409